Ibrahim Mitani SM. Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation. Malaysian J. Sci. [Internet]. 2005 Jun. 30 [cited 2024 Dec. 22];24(1):88. Available from: https://juku.um.edu.my/index.php/MJS/article/view/17173