S.P, C., and W. C.S. “Coating of Titanium Nitride Thin Film on Stainless Steel Using an RF Planar Coil Inductively Coupled Plasma”. Malaysian Journal of Science, vol. 21, no. 1&2, Apr. 2002, pp. 107-13, https://juku.um.edu.my/index.php/MJS/article/view/8596.