DERGHAM, D.; CHEKOUR, L.; KHEN, A. Microstructure and mechanical properties of magnetron sputtered Ti-Si-N coatings with different silicon content. Malaysian Journal of Science, [S. l.], v. 36, n. 3, p. 175–183, 2017. DOI: 10.22452/mjs.vol36no3.4. Disponível em: https://juku.um.edu.my/index.php/MJS/article/view/10160. Acesso em: 22 dec. 2024.